Copper, which is applied by electrodeposition, accounts for roughly a quarter of the CMP market today. In introducing its new CMP tool at Semicon, Novellus declared that "CMP remains the most immature and expensive process" in a semiconductor facility. Novellus says its tool, called Xceda, delivers its slurry through pores in the CMP pad, a technique that contributes to a reduction in slurry usage of up to 40%.
by MICHAEL MCCOY, C&EN NORTHEAST NEWS BUREAU |
August 02, 2004